拥有先进DUV的ASML,排名第二

Release time:2023-03-15
author:AMEYA360
source:网络
reading:2479

  ASML就荷兰政府即将限制半导体设备出口的消息发表声明。声明提到,新的出口管制侧重于先进的芯片制造技术,包括最先进的沉积和浸没式光刻工具。这将迫使ASML需要申请许可证才能出口最先进的浸没式DUV系统。

拥有先进DUV的ASML,排名第二

  尽管ASML尚未收到有关“最先进”确切定义的任何其他信息,但ASML将其解释为“关键浸没”,具体为TWINSCAN NXT:2000i和随后的浸没式DUV系统。ASML指出,主要关注成熟节点的客户可以使用不太先进的浸没式光刻工具。

  ASML主流DUV光刻机产品共有三款设备:TWINSCAN NXT:1980Di,TWINSCAN NXT:2000i和TWINSCAN NXT:2050i,后面两款是公司在声明所指的产品。NXT:1980Di多被用于生产14nm及以上工艺的芯片。

  ASML已经被限制出口EUV,现在还被限制出口先进DUV,究竟这家半导体设备制造商在产业链处于什么水平?


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